A low-power self-calibration digital-output CMOS temperature sensor with ±0.1°C inaccuracy from −40°C to 85°C

An accurate, low-power, self-calibration digital-output CMOS temperature sensor for thermal monitoring is proposed. Our structure takes advantage of the fact that the same type of resistor has the same temperature coefficient to make the sensor calibrate itself. The final output of temperature sensor is 11-bit digital signal. The accuracy and the frequency of the temperature sensor is appropriate to transmit the information of temperature to the temperature compensation module of micro-accelerometer. The BJT-based temperature sensor was designed in 0.18μm CMOS process with 1.5V supply voltage. It has low power consumption of about 1.35μW. Simulation results show that temperature sensor has a nonlinear error bounded of ±0.1 °C over the target operating temperature range (−40 °C, 85 °C).