The First Embedded 14nm FeFinFET NVM: 2T1C FE Array as Electrical Synapses and Activations for High-performance and Low-power Inference Accelerators

We present the 1st embedded 14nm FeFinFET NVMs, 2T1C FE . Compared to 1T1C FE array, 2T1C FE one shows 25x ↑ of the SN ratio, 104x ↓ of the PGM power, and 103x ↓ of READ power. The gradual tuning of conductance for 2T1C FE has been tuned linearly and symmetrically with 3x104x of the window, where 8 separated conductance states can be stored with crystal gaps in between. Continual endurance cycles for 8 states are >107 times. The retention of 8 states has been baked in 85°C for >1 month. The 8 states have also passed the PGM disturbance test. Finally, this 2T1C FE array is as electrical synapses in a very deep neural network (DNN) with 23.8 million parameters for practice, and most importantly, the 2T1C FE is also as an activation, Rectified Linear Unit (ReLU), for the first time. Compared to the 5T-CMOS ReLU, the 2T1C FE ReLU shows 70%↑of inference accuracy. Overall, 2T1C FE shows strong potential as key components in high-performance low-power inference-accelerators.