Production method for flat panel display
2001
The present invention relates to a method of manufacturing a flat panel display capable of TFT TFT scan region and for producing a pixel region of high reliability, comprising the steps of: forming an amorphous silicon film on the substrate region and the pixel regions includes driving, by a laser beam irradiation from the amorphous silicon film is formed in the drive the dehydrogenation zone, while not illuminating the pixel region formed in the amorphous silicon thin film, and further irradiating a laser beam, crystallization of amorphous silicon thin film is formed in the drive region, thereby the amorphous silicon film into a polysilicon film.
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