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Microwave radiation antenna, a microwave plasma source and a plasma processing apparatus
Microwave radiation antenna, a microwave plasma source and a plasma processing apparatus
2012
ikeda tarou
tarou ikeda
tomohito komatu
kasai han
daikou miyasita
nagata yuuki
yuuki nagata
satosi tanihara
fuzino yutaka
yutaka fuzino
Keywords:
Optoelectronics
Plasma processing
Microwave
Ion source
Materials science
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