Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology

A centro-symmetrical, monolithic three-dimensional fine-motion stage was investigated in terms of its static and dynamic characteristics. The outer frame with the size of a 100 mm cube includes differently sized, concentric X/Y/Z linear motion stages. The yaw, pitch and roll of each stage are reduced to less than 0.014 arcsec µm-1 by adjusting the position of the axial load. From three-axis laser-interferometer measurements, a uniaxial load led to linear displacement with the deviation along the other axes of less than 0.06% of 10 µm travel. A simple frequency spectrum for the impulse response without any resonance crosstalk other than the expected resonance peak was obtained for each axis.