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Effect of C Incorporation on the Growth Kinetics of Si>inf /inf inf /inf inf /inf<Layers
Effect of C Incorporation on the Growth Kinetics of Si>inf /inf inf /inf inf /inf<Layers
2006
H. Kim
Su-Yeon Choi
Sun-Kee Hong
Hanyung Jung
Gun-Do Lee
C.S. Kim
E Yoon
Keywords:
Radiochemistry
Chemistry
growth kinetics
Correction
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