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Degradation of the poly-si silicide structure in advanced mos-technologies
Degradation of the poly-si silicide structure in advanced mos-technologies
1988
P. Lippens
Karen Maex
Luc Van den Hove
Roger De Keersmaecker
Probst
W. Koppenol
W. Vanderweg
Keywords:
Policide
Nuclear magnetic resonance
Chemistry
Silicide
Molecular physics
Degradation (geology)
Nanotechnology
Condensed matter physics
Correction
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