Effects of tolerance in fabrication on extended interaction klystron at 0.34 THz

In order to develop a practicable extended interaction klystron (EIK) at 0.34 THz, the potential inaccuracy in fabrication process is studied. The influences of tolerance on electric field distribution, s-value, resonance frequency and impedance are discussed, leading to the acceptable tolerance. Finally the tolerance within 10 um in fabricating the structure of gap is demonstrated acceptable with little shift on device's performance. And the method of WEDM is proposed in manufacture because of its precision and cost.