AFM Investigation of Nanoparticles Formed on Silicon Surface by Femtosecond Laser Pulses

It is shown by atomic force microscopy that nanoparticles formed upon ablation of surface of single-crystal and porous silicon by femtosecond laser pulses have a lateral size from several tens to 200 nm and a height from 2 to 30 nm. Dependences of the nanoparticle sizes and surface concentrations on the residual pressure, which demonstrate the gas atmosphere influence on the nanoparticle formation, are obtained.