Gas purge unit, the installation base of the load port apparatus and be purged vessel

A good sealing characteristics between the flow port and the nozzle opening, such as without mixing particles, capable gas purge unit to fill the interior of the purge target vessel cleaning gas, the load port apparatus and be purged vessel to provide an installation base of. A gas purge unit includes an air supply nozzle 28 with a nozzle opening 26 for blowing out the cleaning gas, they are arranged in a ring shape so as to surround the periphery of the cylindrical projecting portion 28b of the nozzle 28, to the inlet duct 5 removably contactable contact portion 34 and the oscillator 31 which is formed on the tip along the longitudinal direction of the tubular projecting portion 28b between the base portion 28a of the rear end and the nozzle 28 of the oscillator 31 Te having a ring-shaped O-ring 35 which is compressed elastically deformable holding, the. .FIELD 3A