Numerical simulation of nanoparticle pattern fabricated by electrostatic spray deposition

Abstract Electrospray deposition (ESD) as a patterning method of nanoparticles deposited on a substrate has attracted much attention due to several advantages over other methods. However, obtaining an optimum ESD processing condition for nanoparticle pattern relies much on trial experiments because of the lack of reliable numerical simulation. In this study, the deposition characteristics of nanoparticle generated by electrospray were investigated by using a three-dimensional Lagrangian model. Three important process parameters, including solution dielectric constant, applied voltage and surface charge density on mask were considered by fixing the geometrical parameters of the ESD device. Simulation result showed that under the condition of without a mask, the spray diameter increases with increasing solvent dielectric constant, and higher applied voltage makes the spray area wider. Controllability of focusing by changing surface charge density on the mask was confirmed: higher surface charge density on the mask results in more focused deposition. Validity of the numerical simulation developed in this study was verified by comparison with experimental data.