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Influence of Species Transport and Inlet Condition on the MOCVD-Grown GaN Uniformity
Influence of Species Transport and Inlet Condition on the MOCVD-Grown GaN Uniformity
2016
Zhi Zhang
Haisheng Fang
Jiang Zheng
Han Yan
Zhiyin Gan
Keywords:
Metalorganic vapour phase epitaxy
Inlet
Gallium nitride
Materials science
Inorganic chemistry
Metallurgy
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