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Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology
Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology
2015
Daisuke Yamane
Toshifumi Konishi
Motohiro Takayasu
Teruaki Safu
Hiroshi Toshiyoshi
Masato Sone
Kazuya Masu
Katsuyuki Machida
Keywords:
Robustness (computer science)
Microelectromechanical systems
Accelerometer
Materials science
Electronic engineering
Correction
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