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Cost-Efficient High-Throughput Polishing of Silicon Carbide Seed Crystals
Cost-Efficient High-Throughput Polishing of Silicon Carbide Seed Crystals
2020
A. Titov
A. Walters
Hirokazu Sasai
T. Shindo
Keywords:
Throughput
Metallurgy
Cost efficiency
Silicon carbide
Materials science
Polishing
Seed crystal
Correction
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