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Properties of silicon nanoparticles in SiNx deposited by microwave enhanced chemical vapor deposition
Properties of silicon nanoparticles in SiNx deposited by microwave enhanced chemical vapor deposition
2009
F. Delachat
M. Carrada
G. Ferblantier
M. Amann
J.-J. Grob
A. Slaoui
A.-S. Keita
Naciri A. En
K. Zahraman
B. Nsouli
Keywords:
Chemical vapor deposition
Nanoparticle
Combustion chemical vapor deposition
Microwave
Materials science
Silicon
Inorganic chemistry
Chemical engineering
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