Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications

Abstract Using mixed SnO 2 nanoparticles with 1 wt.% MWCNTs sensing materials, NO 2 , NH 3 , and xylene gas sensors were fabricated on micro-platforms. A micro-platform consists of micro-sensing electrode and micro-heater on 2 μm thick SiN x membrane. The fabricated gas sensors were characterized to NO 2 , NH 3 , and xylene gases, respectively, as a function of concentration at 300 °C and temperature from 180 °C to 380 °C at constant concentration. The measured highest sensitivities for the NO 2 , NH 3 , and xylene were 1.06 at 1.2 ppm and 220 °C, 0.19 at 60 ppm, and 220 °C, and 0.15 at 3.6 ppm and 220 °C, respectively. So, it was found that 220 °C was the optimum temperature to have the best sensitivities. From these results, mixed SnO 2 nanoparticles with 1 wt.% MWCNTs showed good sensitivity and selectivity at low power operation below 30 mW. Fabricated micro-gas sensors could be used for ubiquitous sensor network applications to monitor environmental pollutants in the air.