An ion generating apparatus

The invention relates to an ion generating device, which comprises a working gas storage tank (1), a plasma torch (2), a microwave source (3), a coil (4) and a flow controller (10). The plasma torch (2) comprises an outer conductor (5), an inner conductor (6), a short-circuit piston (7) and a jet (8) which are coaxially arranged, wherein the short-circuit piston (7) is arranged between the outer conductor (5) and the inner conductor (6). The microwave source (3) is arranged at an energy feed point at the front end of the outer conductor (5) and is used for feeding energy. A microwave resonantcavity (9) is formed between the outer conductor (5), the inner conductor (6) and the short-circuit piston (7). The coil (4) is wound outside the front part of the outer conductor (5) and is used forgenerating a spiral magnetic field after the coil is energized. By using the device disclosed by the invention to control the parameters of plasmas, the plasmas are not limited to be generated in a closed cavity and the application scope is wider.