Experimental characterization of mm-wave detection by a micro-array of Golay cells

We present experimental results for an uncooled imaging focal plane array technology that consists of a polymer/metal/polymer layered membrane suspended over a micro-fabricated array of cavities. The device operation is Golay-like (heating of air in the cavity causes a detectable deflection of the membrane proportional to incident EM power), but potentially offers both greater sensitivity and more read-out options (optical or electrical) than a traditional Golay cell through tailoring of the membrane properties. The membrane is formed from a layer-by-layer deposition of polymer with one or more monolayers of gold nanoparticles (or other metal) that help control the membrane's elasticity and deformation-dependent optical reflectivity/electrical conductivity. Baseline capabilities of the device have been established through optical measurements of membrane deflection due to incident mm-wave radiation modulated at 30 Hz (corresponding to a video refresh rate). The device demonstrates an NEP of 300 nW/√Hz at 105 GHz for a 19-layer membrane (9 poly/1 Au/9 poly) suspended over an array of 80 μm diameter cavities (depth = 100 μm) etched in a 500 μm thick substrate of Si. Calculations of membrane sensitivity show that this NEP could be reduced to ~ 100 pW/√Hz with enlarged cavity diameters on the order of 600 μm.