256 x 256 InSb focal plane arrays

A 256x256 backside illuminated photovoltaic indium antimonide (InSb) focal plane arrays having spectral response in the medium wavelength infrared (3 to 5 (mu) m) was designed and developed at Chung Shang Institute of Science and Technology for use in a variety of military and commercial applications. Operating at 77 degree(s)K, the arrays had a mean laboratory detectivity of 3.12x10 11 cmHz ½ /W with f/3 optics. The responsitivity non-uniformity was 3%, and the operable yield exceeded 99%. The FPA achieves an Noise Equivalent Temperature Difference (NETD) is less than 0.025 degree(s)K at 300 degree(s)K background with f/3 optics.