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Observation of Lattice Defects in Ion-Implanted Si Wafer by A Double Crystals Spectrometer Method
Observation of Lattice Defects in Ion-Implanted Si Wafer by A Double Crystals Spectrometer Method
1972
Seigo Kishno
Atsuko Noda
Keywords:
Nuclear magnetic resonance
Crystallography
Ion
Wafer
Crystal
Materials science
Spectrometer
Optoelectronics
lattice defects
Correction
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