Particle modeling of nonequilibrium plasmas and gases for materials processing
2005
A recent trend of plasma processing is a low gas pressure This results in a strong nonequilibrium in the electron energy distribution function. The particle modeling is the method to simulate such non-equilibrium plasmas Here is given a systematic description of the particle modeling from fundamentals to advanced applications.
Keywords:
- Correction
- Cite
- Save
- Machine Reading By IdeaReader
0
References
3
Citations
NaN
KQI