Analysis and design of MEMS capacitive switch for microwave distributed phase shifter

A novel low-driven MEMS capacitive switch structure for microwave distributed phase shifter is presented based on the analysis of the operation principle. The driven voltage, response time, release time and vibration modes of the capacitive switch are analyzed using the Intellisuitetrade software. The simulation results show the driven voltage of 2.5 V, the response time less than 30 us, the release time high than 40 us and vibration frequency high than 15 KHz. The microwave distributed phase shifter based on the novel MEMS capacitive switch structure takes on superior electromechanical performance and rapid response time by comparing with other phase shifters based on the common MEMS beam structure switches.