Probenpräparation für die Rückstreuelektronen-Kikuchi-Beugung (Electron Backscatter Diffraction, EBSD) - Teil II: Keramiken

The second part of this paper exclusively deals with specimen preparation of ceramics for EBSD. In comparison with metals ceramics show particular difficulties, that set even higher standards for the prepared sample surface. Concerning the processes of grinding and polishing only those details are mentioned, that differ from the principal methods worked out in Part I: Metals [01Kat]. The possibilities to guarantee electric conductivity on the sample surface are discussed in detail. For five different types of ceramics successful preparation methods are summarised in tables. The results are illustrated by a representative EBS pattern and the corresponding pattern quality index (PQI). Some examples of EBSD-application to different ceramic materials are also shown.