Device for aligning a substrate and a mask

Device for aligning a substrate (4) and a mask (8) to each other with a substrate support (2) for receiving the substrate (4) in a substrate holding plane, with an alignment means for moving the substrate carrier (2) in all directions of three-dimensional space and to rotating the substrate support about an axis perpendicular to the substrate receiving plane and a mask carrier (6), wherein the mask carrier (6) assumes the shape of a hollow hemisphere to receive the mask (8) on the base (7) of the hollow hemisphere, wherein the mask support ( 6) (in a starting position with the hemisphere of the hollow hemisphere on three supporting elements 5) rests and the mask support (6) is rotatably supported in all directions around the center of the base (7), and wherein the substrate carrier (2) within the hollow hemisphere the mask carrier (6) is arranged so that the substrate carrier (2) during a displacement of the substrate carrier (2) in the vertical direction with the base surface (7) of the mask carrier (6) or with a in the base (7) of the mask substrate (6) arranged mask (8) is brought into contact, the mask carrier (6) is thereby raised and thereby to (parallel to the substrate carrier 2) aligns.