Charge conversion film for ion beam charge conversion device

2016 
The purpose of the present invention is to provide a high-quality charge conversion film that is for an ion beam charge conversion device, that has high heat resistance and thermal conductivity, and that can withstand irradiation by a beam over a long period of time. The present invention is a charge conversion film that is for an ion beam charge conversion device, that is a carbon film produced by a polymer firing method, and that has a film thickness of 10-150 µm. The present invention also includes charge conversion films that are for an ion beam charge conversion device, that are a carbon film having a thermal conductivity of 300 W/mK or more in the film surface direction at 25 °C, and that have a film thickness of 10-150 µm. The charge conversion films preferably have a density of 0.90-2.26 g/cm 3 , a weight per unit area of 1.5-30 mg/cm 2 , and an area of 4 cm 2 or more.
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