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Development of Silicon Substrate for Advanced Multi-Chip Packaging Process with the Enhanced Gettering Ability
Development of Silicon Substrate for Advanced Multi-Chip Packaging Process with the Enhanced Gettering Ability
2016
Jeonghoon An
Jang Seop Kim
Anselmo Jaehyeong Lee
Hyung-Kook Park
Hyeung-il Park
Byeong-Sam Moon
Sanghyun Lee
Jea-Gun Park
Keywords:
Getter
Substrate (chemistry)
Chip
Electronic engineering
Engineering
Forensic engineering
Silicon
Nanotechnology
Correction
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