Substrate and manufacturing method thereof

It has a desired shape, and the substrate and a manufacturing method thereof with a high density and high-quality diamond film, as well as a diamond substrate. Sprayed a number of ultra-fine particles of diamond on the growth substrate (silicon substrate) (10) (11), for example, on these ultrafine particles (11), after which arranged a steel ball with a diameter of 1 mm to 3 mm, the growth substrate ( to ultrasonic vibration in the vertical direction with respect to 10). Steel ball is vibrated by the pressure ultrafine particles (12) are embedded in a desired pattern to the growth substrate (10). Then, when growing ultrafine particles (11), a diamond membrane (14) is formed by a CVD method. Only diamond film by removing the growth substrate (10) (14) (diamond substrate) is obtained.