Studies on High-Voltage GaN-on-Si MIS-HEMTs Using LPCVD Si 3 N 4 as Gate Dielectric and Passivation Layer

This paper investigates the performance of AlGaN/gallium nitride (GaN) MIS high electron mobility transistors (MIS-HEMTs). The gate dielectric layer and the surface passivation layer are formed by the low-pressure chemical vapor deposition (LPCVD) Si 3 N 4 . The LPCVD-Si 3 N 4 MIS-HEMTs exhibit a high breakdown voltage (BV) of 1162 V at $I_{\mathrm{ DS}}= 1~\mu \text{A}$ /mm, a low OFF-state leakage of $7.7 \times 10^{-12}$ A/mm, and an excellent ON/OFF-current ratio of $\sim 10^{11}$ . Compared with the static ON-resistance of 2.88 $\text{m}\Omega \cdot \textrm {cm}^{2}$ , the dynamic ON-resistance after high OFF-state drain bias stress at 600 V only increases to 4.89 $\text{m}\Omega \cdot \textrm {cm}^{2}$ . The power device figure of ${\mathrm{ merit}} = \textrm {BV}^{{\vphantom {R^{l}}{2}}}/R_{{{\mathrm{\scriptscriptstyle ON}.{\mathrm{ sp}}}}}$ is calculated to be 469 $\textrm {MW}\cdot \textrm {cm}^{-2}$ . The LPCVD-Si 3 N 4 /GaN interface state density is in the range of (1.4–5.3) $\times 10^{{\vphantom {R^{l}}{13}}}$ eV $^{-1}$ cm $^{-2}$ extracted by the conventional conductance method. Finally, the gate insulator degradation of GaN-based MIS-HEMTs is analyzed by time-dependent dielectric breakdown test. The lifetime is extrapolated to 0.01% of failures after ten years at 300 K by fitting the data with a power law to a gate voltage of 10.1 V.