A 1.1V 35μm × 35μm thermal sensor with supply voltage sensitivity of 2°C/10%-supply for thermal management on the SX-9 supercomputer

Presented here is a thermal sensor, based on transistor off-leakage current, that allows measurement error of less than 3.1degC at 90degC and less than 2degC at 10% Vdd deviation. For experimental evaluation, 11 thermal sensors, each of which occupied only 35 mum times 35 mum area, were placed on a chip, and both the location of a hotspot and the overall temperature distribution were successfully measured and agreed with simulation.