Sensor array capable of detecting multi-component mixed gas

2016 
The invention relates to a sensor array capable of detecting a multi-component mixed gas. The sensor array comprises n gold nanopore film three-electrode ionizing sensors with different electrode spacings. Each of the gold nanopore film three-electrode ionizing sensors comprises a first electrode, a second electrode and a third electrode which are distributed in sequence from the bottom up, the first electrode comprises an electrode of which the inner surface is adhered with a metal film substrate distributed with gold nanopores and provided with small air holes; the second electrode comprises an extractive electrode of which the center has small extraction holes; the third electrode comprises a collector of which the plate surface has a groove; the three electrodes are mutually separated by insulating pillars respectively; the first electrodes of the n gold nanopore film three-electrode ionizing sensors are manufactured on a same electrode plate; The electrode spacings among the three electrodes are set according to the apertures of the air holes and the extraction holes and the side length and the groove depth of the groove. According to the invention, the mixed gas does not need to be separated, and gases of different components are recognized through changing the electrode spacings, the concentrations of various components are detected through currents, furthermore, compared with the prior art, the sensor array capable of detecting the multi-component mixed gas disclosed by the invention is larger in collection current and higher in sensitivity.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    3
    References
    0
    Citations
    NaN
    KQI
    []