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Experiments and Theory of Ablation Plasma Ion Implantation
Experiments and Theory of Ablation Plasma Ion Implantation
2000
Ronald M. Gilgenbach
Baohua Qi
Y. Y. Lau
Mark D. Johnston
Gary Lynn Doll
Achilleas Lazarides
Keywords:
Ion implantation
Electron temperature
High voltage
Ablation
Plasma
Analytical chemistry
Materials science
Laser ablation
Correction
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