ОПТИЧЕСКИЕ ХАРАКТЕРИСТИКИ АНТИОТРАЖАЮЩИХ ПОКРЫТИЙ НА ОСНОВЕ Al2O3–SiО2 ДЛЯ КРЕМНИЕВЫХ СОЛНЕЧНЫХ ЭЛЕМЕНТОВ

We present the results of the numerical modeling of the Al 2 O 3 -SiO 2  single layer composite antireflection coating for silicon solar cells, its manufacturing and investigation of the reflection integrated coefficient R S  £10 %. It is shown that when the concentrations of Al 2 O 3  , SiO 2  are in the ranges 52-84 % and 16-48 % (weight %), respectively, and the thickness of layers is within the 53-97 nm area, the minimum of Rs is achieved for the Al 2 O 3  = 73-77 %, SiO 2  = 27-23 % and 69-75 nm thickness. It is also shown that for layers of Al 2 O 3 : SiO 2  = 75:25 % with a 72 nm thickness the value of R S  is 3.53 %, which is approximately twice lower than R S  for the Si 3 N 4  coating.