Arclöschverfahren and power delivery system with a power converter

Arcloschverfahren to extinction of arcs in a plasma chamber (6) of a plasma system, comprising the steps of: a. Generating a plasma operation power during plasma operation, for generating a plasma in the plasma chamber (6) and for carrying out a plasma processing process using the generated plasma; b. Control of the plasma system for the occurrence of an arc; c. upon detection of an arc in step b .: i. Generating a Arcloschleistung which is less than the plasma operation power supply to the plasma chamber (6) with the Arcloschleistung during a Arcloschbetriebs, characterized in that the plasma operation performance and Arcloschleistung be at least partially generated by a digital-to-analog converter (DAC) (41) is controlled in dependence on the monitoring of the plasma system for the occurrence of an arc, and the analog output of the DAC (41) in a subsequent amplifier path (31-36) to at least a portion of the plasma power or the Arcloschleistung is enhanced.