An amorphous LiCo1/3Mn1/3Ni1/3O2 thin film deposited on NASICON-type electrolyte for all-solid-state Li-ion batteries

Abstract Amorphous LiCo 1/3 Mn 1/3 Ni 1/3 O 2 thin films were deposited on the NASICON-type Li-ion conducting glass ceramics, Li 1+ x + y Al x Ti 2− x Si y P 3− y O 12 (LATSP), by radio frequency (RF) magnetron sputtering below 130 °C. The amorphous films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The Li/PEO 18 –Li(CF 3 SO 2 ) 2 N/LATSP/LiCo 1/3 Mn 1/3 Ni 1/3 O 2 /Au all-solid-state cells were fabricated to investigate the electrochemical performance of the amorphous films. It was found that the low-temperature deposited amorphous cathode film shows a high discharge voltage and a high discharge capacity of around 130 mAh g −1 .