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Evaluation of internal defects in SOI substrates using Near-Infrared low temperature Cathodoluminescence
Evaluation of internal defects in SOI substrates using Near-Infrared low temperature Cathodoluminescence
2021
Shunsuke Ikuta
Masanao Fujimoto
Takashi Asano
Susumu Noda
Yasushi Takahashi
Keywords:
Materials science
Optoelectronics
Cathodoluminescence
Silicon on insulator
Near-infrared spectroscopy
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