A particle system

A particle-optical system comprises a beam generation system (3) for generating a plurality of particle beams (5) and for directing the plurality of particle beams onto an object plane (7); a first deflector assembly (35) to deflect the plurality of particle beams before they impinge on the object plane; an object holder (15) for supporting an object to be examined (17) in the object plane; a plurality of detectors (27) for receiving and detecting the plurality of particle beams after they have traversed the object plane, wherein the detectors are arranged in an arranged on a side opposite to the electron gun side of the object plane detection plane (21); at least a first particle-optical lens (19), to collect outgoing from the object plane particles of the particle beams on the detectors; and a controller (31) which is configured to drive the first deflector assembly to change by deflecting the particle beam impingement of the particle beams on the object plane.