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Plasma parameters and kinetics of active particles in CF4 (CHF3) + Ar mixtures of variable initial composition
Plasma parameters and kinetics of active particles in CF4 (CHF3) + Ar mixtures of variable initial composition
2018
A. Efremov
K-H Kwon
D. Murin
Keywords:
Analytical chemistry
Plasma parameters
Kinetics
Composition (visual arts)
Chemistry
active particles
Correction
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