Investigations of diamond-like carbon films produced directly from an ion beam of industrial ion source with a cold cathode

Abstract Experiments have been carried out on an industrial multifunctional ion-beam treatment system ‘Kashtan’ equipped as an ion source with a cold cathode ‘Radical-M’. DLC films have been produced from ion beams of CH 4 and C 6 H 12 . The composition, structure, mechanical, optical and electrophysical properties of these films have been investigated. The technology of DLC films of 2.0 μm thickness deposited on GaAs wafers has been developed.