For large scale integrated circuits of high-purity tungsten powder preparation

One kind of large scale integrated circuit production method of high purity tungsten powder, tungsten powder metallurgy techniques belonging to the field. The present invention is an industrial 0 ammonium metatungstate as raw materials for formation of ammonium tungstate was dissolved in a solution of concentrated aqueous ammonia after calcination 550-600 deg.] C, a solution of ammonium tungstate and 1μm through 10μm filters and other insoluble matter was filtered after the addition of impurities recrystallization of ammonium metatungstate to give a wet at 90-120 deg.] C, followed by solid-liquid separation, and deionized water and dried to give a purity of 99.999% high purity ammonium metatungstate. High-purity ammonium metatungstate at 800-900 deg.] C to obtain an average particle size reduction of high-purity tungsten powder of 3-5μm in a hydrogen atmosphere. After the detection of high-purity tungsten powder, the total content of impurity elements is less than 10ppm, a purity of greater than 99.999%, to meet the large scale integrated circuit semiconductor chip packages and industry requirements.