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Above 700 V superjunction MOSFETs fabricated by deep trench etching and epitaxial growth
Above 700 V superjunction MOSFETs fabricated by deep trench etching and epitaxial growth
2010
Zehong Li
Min Ren
Bo Zhang
Jun Ma
Tao Hu
zhangshuai
Fei Wang
Jian Chen
Keywords:
Etching
Epitaxy
Electronic engineering
Materials science
Trench
deep trench
Optoelectronics
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