EUV OPC modeling and correction requirements
2014
In this paper we discuss the EUV OPC modeling challenges and potential solutions, as well as OPC integration
requirements to support the forthcoming application of EUV lithography. 10-nm-node OPC modeling is considered as
an example. Wafer and mask process data were collected for calibration and verification patterns, to understand the
mask making error/OPC model interactions. Several factors, including compact mask topography modeling impact, were
analyzed by means of rigorous simulations and model fitting. This was performed on a large-scale data set, to ensure
accurate characterization of the OPC modeling strategies, using a large number of patterns.
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