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1014 Fabrication of Nanogap Electrode using Metalmask Lithography
1014 Fabrication of Nanogap Electrode using Metalmask Lithography
2012
Eri Okawa
Tatsuhiko Ohata
Yasuhisa Naitoh
Masayo Horikawa
Dong F. Wang
Keywords:
Electrode
Analytical chemistry
Lithography
Next-generation lithography
Materials science
Nanotechnology
Fabrication
Correction
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