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Examination of growth mechanism of metastable phases of Ga 2 O 3 and In 2 O 3
Examination of growth mechanism of metastable phases of Ga 2 O 3 and In 2 O 3
2021
Yoshinao Kumagai
Ken Goto
Rie Togashi
Tomohiro Yamaguchi
Hisashi Murakami
Keywords:
Materials science
mechanism
Chemical physics
oxide semiconductor
Metastability
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