Nanoscaled interdigitated electrode arrays for biochemical sensors

Nanoscaled interdigitated electrode arrays were made with Deep U.V. lithography. Electrode widths and spacings from 500 nm down to 250 nm were achieved on large active areas (0.5 mm/spl times/1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. antigens, DNA) by impedimetric measurements. Such a sensor is developed, theoretically analyzed, experimentally characterized, and is demonstrated as an affinity biosensor.