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Development of Flexible RuO 2 Film by Excimer Laser Metal Organic Deposition (ELAMOD)
Development of Flexible RuO 2 Film by Excimer Laser Metal Organic Deposition (ELAMOD)
2019
Yuko Uzawa
Iwao Yamaguchi
Muneyasu Suzuki
Junichi Nomoto
Tomohiko Nakajima
Tetsuo Tsuchiya
Keywords:
Deposition (law)
Electronic engineering
Excimer laser
Computer science
Metal
Optoelectronics
metal organic deposition
Nanotechnology
Correction
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