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Composition control of Ni-silicide by CVD using Ni(PF3)4 and Si3H8
Composition control of Ni-silicide by CVD using Ni(PF3)4 and Si3H8
2005
Masato Ishikawa
Ikuyo Muramoto
Hideaki Machida
Yoshio Ohsihita
Satoshi Imai
Atsushi Ogura
Keywords:
Metallurgy
Nanotechnology
Materials science
Silicide
Composition (visual arts)
Correction
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