Combinatorial Pulsed Laser Deposition of Fe, Cr, Mn, and Ni-Substituted SrTiO3 Films on Si Substrates

Combinatorial pulsed laser deposition (CPLD) using two targets was used to produce a range of transition metal-substituted perovskite-structured Sr(Ti1–xMx)O3−δ films on buffered silicon substrates, where M = Fe, Cr, Ni and Mn and x = 0.05–0.5. CPLD produced samples whose composition vs distance fitted a linear combination of the compositions of the two targets. Sr(Ti1–xFex)O3−δ films produced from a pair of perovskite targets (SrTiO3 and SrFeO3 or SrTiO3 and SrTi00.575Fe0.425O3) had properties similar to those of films produced from single targets, showing a single phase microstructure, a saturation magnetization of 0.5 μB/Fe, and a strong out-of-plane magnetoelastic anisotropy at room temperature. Films produced from an SrTiO3 and a metal oxide target consisted of majority perovskite phases with additional metal oxide (or metal in the case of Ni) phases. Films made from SrTiO3 and Fe2O3 targets retained the high magnetic anisotropy of Sr(Ti1–xFex)O3−δ, but had a much higher saturation magnetization than...