Effect of excimer laser fluence on the surface structuring of Ti under vacuum condition

The effect of variation of excimer laser fluences on the surface structuring of titanium (Ti) targets has been investigated. The KrF excimer laser (λ = 248 nm, t = 20 ns, repetition rate 20 Hz) has been employed for this purpose. The targets were irradiated for various laser fluences ranging from 0.86 J cm−2 to 1.27 J cm−2 under vacuum condition. Various diagnostic techniques like scanning electron microscope (SEM), atomic force microscope (AFM), and X-ray diffraction (XRD) have been utilized to investigate the surface topography and structural changes of laser ablated targets. SEM analysis reveals the formation of laser-induced periodic surface structures (LIPSS) at the central ablated region. The periodicity of LIPSS increases from 5 μm to 88 μm with the increase of fluence from 0.86 J cm−2 to 1.27 J cm−2. The formation of grains is observed at the peripheral ablated region for all laser fluences. Reduction in grain size from 7.7 μm to 3.8 μm is observed with increasing fluence from minimum to maximum v...