Simple unimorph deformable mirrors fabricated from piezo buzzers

This study shows how unimorph deformable mirrors can be effectively fabricated out of commercially available piezo-buzzers without any high-tech equipment. Our design involves a quad-channel mirror with monolithically integrated flexures. The mirror is controlled by a custom quad-channel high-voltage driver unit, capable of 93 Vp-p and 75 kpps performance. The system exhibits 16-bit resolution over the angular working range of ±1.85 mrad, with 0.04 mrad V−1 angular sensitivity and 14% hysteresis. We demonstrate the mirror performance for focus control in microscopy and high-precision laser beam steering, opening a wide variety of applications in computational imaging, confocal microscopy, optical tweezing and laser lithography.