A CMOS Proximity Capacitance Image Sensor with $16\mu \mathrm{m}$ Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames Per Second

A $16\mu \mathrm{m}$ pixel pitch 60 frames per second CMOS proximity capacitance image sensor fabricated by a $0.18\mu \mathrm{m}$ CMOS process technology is presented. By the introduction of noise cancelling operation, both fixed pattern noise and kTC noise are significantly reduced, resulting in the 0.1aF (10 −19 F) detection accuracy. Proximity capacitance imaging results using the developed sensor are also demonstrated.